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Passivation of miniature microwave coplanar waveguides using a thin film fluoropolymer electret

Jaouad Marzouk 1 Vanessa Avramovic 1, 2 David Guérin 1, 3 Steve Arscott 1, 4, *
* Corresponding author
2 PCMP - IEMN - Plateforme de Caractérisation Multi-Physiques - IEMN
IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
3 CMNF - IEMN - Centrale de Micro Nano Fabrication - IEMN
IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
4 NAM6 - IEMN - Nano and Microsystems - IEMN
IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
Abstract : The insertion losses of miniature gold/silicon-on-insulator (SOI) coplanar waveguides (CPW) are rendered low, stable, and light insensitive when covered with a thin film (95 nm) fluoropolymer deposited by a trifluoromethane (CHF 3) plasma. Microwave characterization (0-50 GHz) of the CPWs indicates that the fluoropolymer stabilizes a hydrogen-passivated silicon surface between the CPW tracks. The hydrophobic nature of the fluoropolymer acts as a humidity barrier, meaning that the underlying intertrack silicon surfaces do not re-oxidize over time-something that is known to increase losses. In addition, the fluoropolymer thin film also renders the CPW insertion losses insensitive to illumination with white light (2400 lx)-something potentially advantageous when using optical microscopy observations during microwave measurements. Capacitance-voltage (CV) measurements of gold/fluoropolymer/silicon metal-insulator-semiconductor (MIS) capacitors indicate that the fluoropolymer is an electret-storing positive charge. The experimental results suggest that the stored positive charge in the fluoropolymer electret and charge trapping influence surface-associated losses in CPW-MIS device modelling supports this. Finally, and on a practical note, the thin fluoropolymer film is easily pierced by commercial microwave probes and does not adhere to them-facilitating the repeatable and reproducible characterization of microwave electronic circuitry passivated by thin fluoropolymer.
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Submitted on : Thursday, December 16, 2021 - 12:47:09 PM
Last modification on : Tuesday, April 26, 2022 - 4:06:04 PM
Long-term archiving on: : Thursday, March 17, 2022 - 6:49:02 PM

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Jaouad Marzouk, Vanessa Avramovic, David Guérin, Steve Arscott. Passivation of miniature microwave coplanar waveguides using a thin film fluoropolymer electret. Scientific Reports, Nature Publishing Group, 2021, ⟨10.1038/s41598-021-03540-0⟩. ⟨hal-03483190⟩

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