Transport properties of a thin GaN channel formed in an Al0.9Ga0.1N/GaN heterostructure grown on AlN/sapphire template - Institut d'électronique, de microélectronique et de nanotechnologie Accéder directement au contenu
Article Dans Une Revue Journal of Applied Physics Année : 2022

Transport properties of a thin GaN channel formed in an Al0.9Ga0.1N/GaN heterostructure grown on AlN/sapphire template

Résumé

Despite a high lateral breakdown voltage above 10 kV for large contact distances and a breakdown field of 5 MV cm −1 for short contact distances, an Al 0.9 Ga 0.1 N/GaN heterostructure with an 8 nm strained GaN channel grown on an AlN/sapphire template suffers from a low and anisotropic mobility. This work deals with a material study to elucidate this issue. Threading dislocations were observed along the growth direction in transmission electron microscopy pictures and are more in number in the (11−20) plane. Steps were also detected in this plane at the GaN channel interfaces. With the help of device simulations and static characterizations, the deep level transient spectroscopy technique allowed five traps located in the GaN channel to be identified. Most of them are associated with nitrogen-or galliumvacancy-related defects and are expected to be localized at the interfaces of GaN with the buffer and the barrier. It is likely that these electrically active defects contribute to reduce the mobility in the two-dimensional electron gas. In addition, a link was established between the mobility and the dependence of the quality of the channel interfaces on the crystallographic orientation.
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Dates et versions

hal-03619060 , version 1 (24-03-2022)

Identifiants

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Julien Bassaler, Rémi Comyn, Catherine Bougerol, Yvon Cordier, F Medjdoub, et al.. Transport properties of a thin GaN channel formed in an Al0.9Ga0.1N/GaN heterostructure grown on AlN/sapphire template. Journal of Applied Physics, 2022, 131 (12), pp.124501. ⟨10.1063/5.0077107⟩. ⟨hal-03619060⟩
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