Versatile microfabricated alkali vapor cells using local sealing
Résumé
We report on a new technique to form and seal microfabricated cells that alleviates some of the limitations imposed by current solutions. The technique consists in integrating single-use sealing structures that can be actuated through laser irradiation, either to isolate cavities from each other or to connect them. Inspired by the well-established glass-blowing techniques, it reproduces on a wafer the “make-seal” and “break-seal” features found in conventional cell filling setups. By allowing cells to be evacuated, filled and sealed after having been fully-formed, this technique opens new venues for atomic devices. Here, we demonstrate both features and present one use case where alkali dispensers are used in association with non-noble gasses despite their gettering ability.
Domaines
Sciences de l'ingénieur [physics]
Origine : Fichiers produits par l'(les) auteur(s)