Step conformal solid electrolyte deposited by ALD on robust 3D silicon scaffold for on chip Li-ion microbattery - Université de Lille
Communication Dans Un Congrès Année : 2016
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hal-02331833 , version 1 (24-10-2019)

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  • HAL Id : hal-02331833 , version 1

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Manon Létiche, Étienne Eustache, Jeremy Freixas, Laurence Morgenroth, Pascal Tilmant, et al.. Step conformal solid electrolyte deposited by ALD on robust 3D silicon scaffold for on chip Li-ion microbattery. Material Research Society Spring Meeting (MRS Spring 2016), Mar 2016, Phoenix, United States. ⟨hal-02331833⟩
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